METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD

S. G. Gevorgyan; S. T. Muradyan; M. H. Azaryan; G. H. Karapetyan

doi:10.46991/PYSU:A/2010.44.3.063

METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD

Authors

S. G. Gevorgyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Institute for Physical Research, Nat. Academy of Sci., Armenia
S. T. Muradyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Russian-Armenian (Slavonic) State University, Armenia
M. H. Azaryan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU, Armenia
G. H. Karapetyan Center on Superconductivity and Scientific Instrumentation, Chair of Solid State Physics, YSU; Institute for Physical Research, Nat. Academy of Sci., Armenia

DOI:

https://doi.org/10.46991/PYSU:A/2010.44.3.063

Keywords:

Single-layer Flat-Coil-Oscillator method, a nanometer resolution thickness measuring and controlling technique, high-Tc superconductive films and tapes

Abstract

A method for measuring of any composition films and tapes thickness with a nanometer resolution is suggested and validated experimentally. That operates on the base of a single-layer flat-coil-oscillator technique. A laboratory prototype of a device is designed and created, based on this method. Besides, PC operation in a “NI LabVIEW” software environment, as well as preliminary tests and calibration of the created device is implemented. It may find variety of applications in a research and in high-tech technology.

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Published

2010-10-21

How to Cite

Gevorgyan, S. G., Muradyan, S. T., Azaryan, M. H., & Karapetyan, G. H. (2010). METHOD FOR MEASURING THICKNESS OF THIN OBJECTS WITH A NANOMETER RESOLUTION, BASED ON THE SINGLE-LAYER FLAT-COIL-OSCILLATOR METHOD. Proceedings of the YSU A: Physical and Mathematical Sciences, 44(3 (223), 63–67. https://doi.org/10.46991/PYSU:A/2010.44.3.063